Optical emission from oxygen plasma in e and H modes

IEEE Transactions on Plasma Science

Volumn 39, Issue 11 PART 1, 2011, Pages 2502-2503

  Kregar, Zlatko ^a   Milošević, Slobodan ^a   Vesel, Alenka ^b  

^a INSTITUTE OF PHYSICS   (Croatia)

^b JO EF STEFAN INSTITUTE   (Slovenia)

Author keywords

Optical emission spectroscopy; plasma modes; RF oxygen plasma

Indexed keywords

DISSOCIATION FRACTIONS; E AND H MODES; ELECTRODELESS DISCHARGE; HIGH-POWER; LOW POWER; NAKED-EYE; OPTICAL EMISSIONS; OXYGEN MOLECULE; OXYGEN PLASMAS; PLASMA MODES; PLASMA REACTORS; REACTIVE OXYGEN; RF GENERATORS; RF OXYGEN PLASMA;

ELECTRIC DISCHARGES; EMISSION SPECTROSCOPY; LIGHT EMISSION; OXYGEN; PLASMA APPLICATIONS; PLASMAS;

OPTICAL EMISSION SPECTROSCOPY;

EID: 81255158679     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2011.2160733     Document Type: Article

References (6)

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