Plasma polymerization of TEOS for QCM-based VOC vapor sensing

EPJ Applied Physics

Volumn 56, Issue 2, 2011, Pages

  Bougharouat, A ^a   Bellel, A ^a   Sahli, S ^a   Segui Y ^b   Raynaud, P ^b  

^a Universite Mentouri Constantine   (Algeria)

^b d'Hydraulique et des Telecommunications   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIONAL MASS; ANALYTES; FTIR; HIGHLY SENSITIVE; METHANOL VAPORS; REPRODUCIBILITIES; RESONANCE FREQUENCY SHIFT; SENSING PROPERTY; SENSITIVE LAYERS; VOC VAPORS;

ACETONE; ETHANOL; FOURIER TRANSFORM INFRARED SPECTROSCOPY; METHANOL; PLASMA POLYMERIZATION; POLYMERS; QUARTZ; RESONANCE; VAPORS; VOLATILE ORGANIC COMPOUNDS;

QUARTZ CRYSTAL MICROBALANCES;

EID: 80555138791     PISSN: 12860042     EISSN: 12860050     Source Type: Journal    
DOI: 10.1051/epjap/2011110144     Document Type: Article

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