Microstructure study of ZnO thin films on Si substrate grown by MOCVD

Journal of Physics D: Applied Physics

Volumn 40, Issue 16, 2007, Pages 4882-4886

  Huang, Jingyun ^a   Ye, Zhizhen ^a   Lu, Huanming ^a   Wang, Lei ^a   Zhao, Binghui ^a   Li, Xianhang ^a  

^a ZHEJIANG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

FILM GROWTH; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MICROSTRUCTURE; SILICON; SUBSTRATES; ZINC OXIDE;

EDGE DISLOCATIONS; GROWTH DIRECTION; SYMMETRIC STRUCTURE;

THIN FILMS;

EID: 34547778966     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/16/019     Document Type: Article

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