Reinforced silicon neural microelectrode array fabricated using a commercial MEMS process

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 8, Issue 3, 2009, Pages

  Hajj Hassan, Mohamad ^a   Chodavarapu, Vamsy ^a   Musallam, Sam ^a,b  

^a MCGILL UNIVERSITY   (Canada)

^b Department of Physiology ^*  (Canada)

Author keywords

Brain machine interface; Electrode reinforcement; Elongated microelectrodes; MicraGem; Neural prosthesis; NeuroMEMS; Silicon microfabrication

Indexed keywords

ASPECT RATIO; COMPOSITE MICROMECHANICS; COMPUTER SIMULATION; FABRICATION; MATHEMATICAL MODELS; MEMS; MICROELECTROMECHANICAL DEVICES; PROSTHETICS; REINFORCEMENT; TISSUE;

BRAIN MACHINE INTERFACE; ELONGATED MICROELECTRODES; MICRAGEM; NEURAL PROSTHESIS; NEUROMEMS; SILICON MICROFABRICATION;

MICROELECTRODES;

EID: 80055103896     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3184795     Document Type: Article

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