Hydrogen sensing properties of dielectrophoretically assembled SnO 2 nanoparticles on CMOS-compatible micro-hotplates

Nanotechnology

Volumn 22, Issue 44, 2011, Pages

  Kwak, Youngreal ^a   Wang, Jianwei ^a   Meang, Sunglyul ^b   Kim, Gil Ho ^a  

^a Sungkyunkwan University   (South Korea)

^b Woosuk University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

APPLIED VOLTAGES; CMOS COMPATIBLE; CONTINUOUS FLOWS; DURATION TIME; HIGH ASPECT RATIO; HYDROGEN GAS SENSING; HYDROGEN SENSING PROPERTIES; IN-SITU; IV CHARACTERISTICS; MAXIMUM VALUES; MICRO FLUIDIC SYSTEM; MICROHOTPLATES; STEP COVERAGE;

ASPECT RATIO; DROPS; ELECTRODES; ELECTROPHORESIS; FABRICATION; GAS SENSING ELECTRODES; HYDROGEN; NANOPARTICLES;

VANADIUM;

EID: 80054887383     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/22/44/445501     Document Type: Article

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