Enhancement of nanovoid formation in annealed amorphous Al 2O3 including W

Journal of Applied Physics

Volumn 110, Issue 6, 2011, Pages

  Nakamura, R ^a   Ishimaru, M ^a   Hirata, A ^b   Sato, K ^c   Tane, M ^a   Kimizuka, H ^a   Shudo, T ^a   Konno, T J ^c   Nakajima, H ^a  

^a OSAKA UNIVERSITY   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATRICES; AMORPHOUS STRUCTURES; ATOMIC CONFIGURATION; HAADF-STEM; HIGH-ANGLE ANNULAR DARK FIELDS; MOLECULAR DYNAMICS SIMULATIONS; NANO-VOIDS; PAIR DISTRIBUTION FUNCTIONS; RESISTANCE-HEATING; SCANNING TRANSMISSION ELECTRON MICROSCOPY; VOID FORMATION;

ANNEALING; DISTRIBUTION FUNCTIONS; MOLECULAR DYNAMICS; TRANSMISSION ELECTRON MICROSCOPY;

ALUMINUM;

EID: 80053537674     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3639290     Document Type: Article

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