Preparation of Al-doped ZnO sputter target by hot pressing

Transactions of Nonferrous Metals Society of China (English Edition)

Volumn 21, Issue 7, 2011, Pages 1550-1556

  Wang, Xing Ming ^a   Bai, Xue ^a   Duan, Hua Ying ^a   Shi, Zhi Xia ^a   Sun, Jing ^a   Lu, Shi Gang ^a   Huang, Song Tao ^a  

^a GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS   (China)

Author keywords

aluminum doped ZnO (AZO); hot pressing; phase structure; pore; sputter target

Indexed keywords

AL-DOPED ZNO; ALUMINUM-DOPED ZNO; DENSIFICATION PROCESS; HOT PRESSING METHOD; HOT PRESSING TEMPERATURE; ISOLATED PORES; LOW RESISTIVITY; MASS RATIO; PORE; PORE EVOLUTION; PRESSING CONDITIONS; PRESSURELESS SINTERING; RELATIVE DENSITY; SINTERING TEMPERATURES; STRUCTURE CHANGE; TWO STAGE; ZNO;

ALUMINUM; ELECTRIC CONDUCTIVITY; PHASE STRUCTURE; SINTERING; ZINC OXIDE;

HOT PRESSING;

EID: 80053250967     PISSN: 10036326     EISSN: None     Source Type: Journal    
DOI: 10.1016/S1003-6326(11)60895-9     Document Type: Article

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