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Chemical Vapor Deposition

Volumn 17, Issue 7-9, 2011, Pages 204-210

Thermal oxidation of parylene X

(1) Senkevich, Jay J a

a MASSACHUSETTS INSTITUTE OF TECHNOLOGY (United States)

Author keywords

Birefringence; Oxidation; Parylene N; Parylene X; Thin film

Indexed keywords

CHAIN SCISSION; DEGRADATION MECHANISM; ELLIPSOMETRIC DATA; FUNCTION OF TIME; INFRARED SPECTROSCOPIC; LINEAR CHAIN; NETWORKED POLYMER; NETWORKED STRUCTURES; PARYLENE C; PARYLENE-N; PARYLENES; POLY(CHLORO-P-XYLYLENE); POLYMER CHAINS; POST-DEPOSITION; THERMAL OXIDATION; THERMOMECHANICAL PROPERTIES; VIA CHAIN;

BIREFRINGENCE; DEGRADATION; INFRARED SPECTROSCOPY; MECHANICAL PROPERTIES; OXIDATION; OXYGEN; THIN FILMS; VAPOR DEPOSITION;

POLYMERS;

EID: 80053190634 PISSN: 09481907 EISSN: 15213862 Source Type: Journal
DOI: 10.1002/cvde.201106904 Document Type: Article

Times cited : (7)

References (16)

1
- 0034276294
- J. B. Fortin, T.-M. Lu, J. Vac. Sci. Technol. A 2000, 18, 2459.
- (2000) J. Vac. Sci. Technol. A , vol.18 , pp. 2459
- Fortin, J.B.¹ Lu, T.-M.²

2
- 0009358010
- T. E. Nowlin, D. Foss Smith, Jr, G. S. Cieloszyk, J. Polym. Sci.: Polym. Chem. 1980, 18, 2103.
- (1980) J. Polym. Sci.: Polym. Chem. , vol.18 , pp. 2103
- Nowlin, T.E.¹ Foss Smith Jr., D.² Cieloszyk, G.S.³

3
- 0347132868
- T. E. Baker, G. L. Fix, J. S. Judge, J. Electrochem. Soc. 1980, 127, 1851.
- (1980) J. Electrochem. Soc. , vol.127 , pp. 1851
- Baker, T.E.¹ Fix, G.L.² Judge, J.S.³

4
- 34648847167
- D. W. Grattan, M. Bilz, Studies in Conservation 1991, 36, 44.
- (1991) Studies in Conservation , vol.36 , pp. 44
- Grattan, D.W.¹ Bilz, M.²

5
- 0037150328
- J. Lahann, R. Langer, Macromolecules 2002, 35, 4380.
- (2002) Macromolecules , vol.35 , pp. 4380
- Lahann, J.¹ Langer, R.²

6
- 33745547005
- Y. Elkasabi, H.-Y. Chen, J. Lahann, Adv Mater. 2006, 18, 1521.
- (2006) Adv Mater. , vol.18 , pp. 1521
- Elkasabi, Y.¹ Chen, H.-Y.² Lahann, J.³

7
- 0016025213
- B. L. Joesten, J. Appl. Polym. Sci. 1974, 18, 439.
- (1974) J. Appl. Polym. Sci. , vol.18 , pp. 439
- Joesten, B.L.¹

8
- 0001419040
- W. F. Gorham, J. Polym. Sci: Part A-1 Polym. Chem. 1966, 4, 3027.
- (1966) J. Polym. Sci: Part A-1 Polym. Chem. , vol.4 , pp. 3027
- Gorham, W.F.¹

9
- 33947337088
- D. J. Cram, A. C. Day, J. Org. Chem. 1966, 4, 1227.
- (1966) J. Org. Chem. , vol.4 , pp. 1227
- Cram, D.J.¹ Day, A.C.²

10
- 0343550314
- J. J. Senkevich, S. B. Desu, V. Simkovic, Polymer 2000, 41, 2379.
- (2000) Polymer , vol.41 , pp. 2379
- Senkevich, J.J.¹ Desu, S.B.² Simkovic, V.³

11
- 28844459479
- B. P. Carrow, R. E. Murray, B. W. Woods, J. J. Senkevich, Mater. Res. Soc. Symp. Proc. 2005, 863, 189.
- (2005) Mater. Res. Soc. Symp. Proc. , vol.863 , pp. 189
- Carrow, B.P.¹ Murray, R.E.² Woods, B.W.³ Senkevich, J.J.⁴

12
- 0010043913
- J. J. Senkevich, S. B. Desu, Chem. Mater. 1999, 11, 1814.
- (1999) Chem. Mater. , vol.11 , pp. 1814
- Senkevich, J.J.¹ Desu, S.B.²

13
- 54949084247
- J. J. Senkevich, B. W. Woods, J. J. McMahon, P.-I. Wang, Chem. Vap. Deposition 2007, 13, 55.
- (2007) Chem. Vap. Deposition , vol.13 , pp. 55
- Senkevich, J.J.¹ Woods, B.W.² McMahon, J.J.³ Wang, P.-I.⁴

14
- 34848855568
- N. Sundaraganesan, J. B. Dominic, Spectrochemica Acta. Part A, Mol BioMol. Spectr. 2007, 68, 771.
- (2007) Spectrochemica Acta. Part A, Mol BioMol. Spectr. , vol.68 , pp. 771
- Sundaraganesan, N.¹ Dominic, J.B.²

15
- 0007944929
- J. J. Senkevich, Chem. Vap. Deposition 1999, 5, 257.
- (1999) Chem. Vap. Deposition , vol.5 , pp. 257
- Senkevich, J.J.¹

16
- 0000040405
- R. J. Good, M. N. Koo, J. Coll. Interface Sci. 1979, 71, 283.
- (1979) J. Coll. Interface Sci. , vol.71 , pp. 283
- Good, R.J.¹ Koo, M.N.²

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