Surface roughness analysis and improvement of micro-fluidic channel with excimer laser

Microfluidics and Nanofluidics

Volumn 2, Issue 4, 2006, Pages 357-360

  Heng, Qi ^a   Tao, Chen ^a   Tie chuan, Zuo ^a  

^a BEIJING UNIVERSITY OF TECHNOLOGY   (China)

Author keywords

Excimer laser; Micro fluidic channel; Polishing; Surface roughness

Indexed keywords

EXCIMER LASERS; FABRICATION; MICROMACHINING; POLISHING; SURFACE ROUGHNESS;

DIRECT-WRITING TECHNIQUE; LASER FLUENCE; MICRO-FLUIDIC CHANNEL; PMMA SHEET;

FLUIDIC DEVICES;

EID: 33745467773     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-006-0078-7     Document Type: Article

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