Direct fabrication of arbitrary-shaped ferroelectric nanostructures on plastic, glass, and silicon substrates

Advanced Materials

Volumn 23, Issue 33, 2011, Pages 3786-3790

  Kim, Suenne ^a   Bastani, Yaser ^b   Lu, Haidong ^c   King, William P ^d   Marder, Seth ^a,e   Sandhage, Kenneth H ^a,e   Gruverman, Alexei ^c   Riedo, Elisa ^a   Bassiri Gharb, Nazanin ^b  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c UNIVERSITY OF NEBRASKA LINCOLN   (United States)

^d University of Illinois at Urbana Champaign   (United States)

^e Georgia Institute of Technology   (United States)

Author keywords

ferroelectric materials; nanomanufacturing; piezoelectric materials; thermochemical nanolithography

Indexed keywords

COMPLEMENTARY METAL OXIDE SEMICONDUCTORS; FERROELECTRIC NANOSTRUCTURES; NANO SCALE; NANO-MANUFACTURING; SILICON SUBSTRATES; SODA LIME GLASS SUBSTRATE; SOL-GEL PRECURSORS; THERMOCHEMICAL NANOLITHOGRAPHY;

FERROELECTRICITY; GLASS; NANOLITHOGRAPHY; NANOSTRUCTURES; SEMICONDUCTING SILICON; SUBSTRATES; ZIRCONIUM;

FERROELECTRIC MATERIALS;

EID: 80052156425     PISSN: 09359648     EISSN: 15214095     Source Type: Journal    
DOI: 10.1002/adma.201101991     Document Type: Article

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