Reflectance-based TiO2 photonic crystal sensors

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 2682-2685

  Huang, Y ^a   Pandraud, G ^a   Sarro, P M ^a  

^a DELFT UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

ALD TiO2; Photonic crystals; reflectance; sensors

Indexed keywords

BIOMEDICAL INDUSTRY; ETCH-BACK TECHNIQUE; FABRICATION TECHNIQUE; HIGH ASPECT RATIO; HIGH RI; HIGH SENSITIVITY; NANOPILLAR; OPTICAL SIGNALS; PHOTONIC CRYSTAL SENSORS; PROCESS STEPS; SENSING MATERIAL; TIO; WAVELENGTH REGIONS;

ACTUATORS; ASPECT RATIO; ATOMIC LAYER DEPOSITION; CHEMICAL CONTAMINATION; CHEMICAL STABILITY; MICROSYSTEMS; REFLECTION; REFRACTIVE INDEX; SOLID-STATE SENSORS; TITANIUM DIOXIDE;

PHOTONIC CRYSTALS;

EID: 80052117239     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969771     Document Type: Conference Paper

References (12)

1. Joannopoulos JD, Johnson SG, Winn JN and Meade RD. Photonic crystals: Molding the Flow of Light. 2nd ed. Princeton: Princeton Univ. Press; 2008.
2. N. Skivesen, A. Têtu, M. Kristensen, J. Kjems, L. Frandsen and P. Borel, "Photonic-crystal waveguide biosensor", Opt. express, Vol. 15, pp. 3169-3176, 2007.
3. A. Di Falco, L. O'Faolain and T. F. Krauss, "Chemical sensing in slotted photonic crystal heterostructure cavities", Appl. Phys. Lett. , Vol. 94, 063503, 2009.
4. W. Stumpf, T. Asano, T. Kojima, M. Fujita, Y. Tanaka and S. Noda, "Reflectance measurement of two-dimensional photonic crystal nanocavities with embedded quantum dots", Phys. Rev. B, Vol. 82, 075119, 2010.
5. E. Cho, H. Kim, B. Cheong, P. Oleg, W. Xianyua and J. Sohn, et al. , "Two-dimensional photonic crystal color filter development", Opt. Express, Vol. 17, pp. 8621-8629, 2009.
6. S. G. Johnson and J. D. Joannopoulos, "Blockiterative frequency-domain methods for Maxwell's equations in a planewave basis", Optics Express, Vol. 8, pp. 173-190, 2001.
7. W. Dash and R. Newman, "Intrinsic Optical Absorption in Single-Crystal Germanium and Silicon at 77°K and 300°K", Phys. Rev. , Vol. 99, pp. 1151-1155, 1955.
8. 2 anatase thin films", J. Appl. Phys. , Vol. 75, pp. 2042-2047, 1994.
9. 2 thin films", Appl. Surf. Sci. , Vol. 185, pp. 27-33, 2001.
10. Y. Huang, G. Pandraud and PM. Sarro, "An ALD Etch-back Method to Fabricate High Aspect Ratio Nanopillar Arrays for Photonic Crystal Sensors", Proc. Eurosensors XXIV, Linz, Austria, September 5-8, 2010, C2L-C-5.
11. R. Budwig, "Refractive index matching methods for liquid flow investigations", Exp. Fluids, Vol. 17, pp. 350-355, 1994.
12. K. Zhou, X. Chen, L. Zhang and I. Bennion, "Highsensitivity optical chemsensor based on etched Dfibre Bragg gratings", Electronics. Lett. , Vol. 40, pp. 232-234, 2004.