CO2 measurement using an AlN/SI SAW sensor

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 1136-1139

  Fanget, S ^a   Grange, H ^a   Palancade, F ^a   Ganuchaud, G ^a   Matheron, M ^a   Charlot, S ^a   Bordy, T ^a   Hoang, T ^a   Rey, P ^a   Mercier, D ^a   Brunet Manquat, P ^a   Robert, P ^a  

^a CEA LETI   (France)

Author keywords

Aluminum Nitride; Carbon dioxide detection; gas sensor; sensitive polymers; Surface Acoustic Wave sensor

Indexed keywords

ALN; AMINO GROUP; CARBON DIOXIDE DETECTION; GAS SENSOR; GRAVIMETRIC APPROACH; INDOOR AIR QUALITY MONITORING; POLY(ALLYLAMINE); SAW SENSORS; SENSITIVE POLYMERS; SURFACE ACOUSTIC WAVE SENSOR; SURFACE ACOUSTIC WAVE SENSORS;

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC TRANSDUCERS; ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ACTUATORS; AIR QUALITY; ALUMINUM; ALUMINUM NITRIDE; FINITE ELEMENT METHOD; GLOBAL WARMING; GREENHOUSE EFFECT; INDOOR AIR POLLUTION; MICROSYSTEMS; NITRIDES; POLYMERS; SOLID-STATE SENSORS;

CARBON DIOXIDE;

EID: 80052113956     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969259     Document Type: Conference Paper

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