A CMOS capacitive pressure sensor chip for fingerprint detection

2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11

Volumn , Issue , 2011, Pages 24-27

  Hsiung, Yung Shih ^a   Lu, Michael S C ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

capacitive sensor; CMOS; fingerprint; tactile

Indexed keywords

BIOMETRIC TECHNIQUES; CAPACITIVE FINGERPRINT SENSORS; CAPACITIVE PRESSURE SENSORS; CAPACITIVE SENSOR; CMOS; CMOS SENSORS; FINGERPRINT; FINGERPRINT IMAGES; METAL LAYER; POST-CMOS; SENSOR SENSITIVITY; TACTILE; THIN-FILM DEPOSITIONS; WET-ETCH;

ACTUATORS; BIOMETRICS; CMOS INTEGRATED CIRCUITS; MICROSYSTEMS; SENSOR ARRAYS; WET ETCHING;

SOLID-STATE SENSORS;

EID: 80052105196     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/TRANSDUCERS.2011.5969123     Document Type: Conference Paper

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