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Applied Mechanics and Materials

Volumn 80-81, Issue , 2011, Pages 245-249

Material characteristics of zinc oxide doped aluminum for microharvesting

(3) Chang, Wen Yang a Fang, Te Hua b Syu, Cheng Hong a

a NATIONAL FORMOSA UNIVERSITY (Taiwan)

b NATIONAL KAOHSIUNG UNIVERSITY OF APPLIED SCIENCES (Taiwan)

Author keywords

Aluminum; Doped; Microharvesting; V zigzag; Zinc oxide

Indexed keywords

AREA RATIOS; CONCENTRATION RATIO; DOPED; MATERIAL CHARACTERISTICS; MEMS FABRICATION; MICROHARVESTING; PEAK INTENSITY; V-ZIGZAG; ZIGZAG STRUCTURE; ZNO;

ALUMINUM; EPITAXIAL GROWTH; GROWTH TEMPERATURE; ITO GLASS; MECHANICS; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; ZINC; ZINC OXIDE;

DOPING (ADDITIVES);

EID: 80052100302 PISSN: 16609336 EISSN: 16627482 Source Type: Book Series
DOI: 10.4028/www.scientific.net/AMM.80-81.245 Document Type: Conference Paper

Times cited : (1)

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