Pressure and temperature dependence of dissociative and non-dissociative electron attachment to CF3: Experiments and kinetic modeling

Journal of Chemical Physics

Volumn 135, Issue 5, 2011, Pages

  Shuman, Nicholas S ^a   Miller, Thomas M ^a   Friedman, Jeffrey F ^a   Viggiano, Albert A ^a   Maergoiz, Anatol I ^b   Troe, Jrgen ^b,c  

^a AIR FORCE RESEARCH LABORATORY   (United States)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

^c MAX PLANCK INSTITUTE FOR BIOPHYSICAL CHEMISTRY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DISSOCIATIVE CHANNELS; DISSOCIATIVE ELECTRON ATTACHMENT; ELECTRON ATTACHMENT; KINETIC MODELING; NEUTRAL DENSITIES; PRESSURE AND TEMPERATURE; RADICAL SOURCE; STATISTICAL THEORY;

ELECTRON ENERGY ANALYZERS; ELECTRONS; EXPERIMENTS; IGNEOUS ROCKS; KINETIC THEORY; KINETICS; MASS SPECTROMETRY; RATE CONSTANTS;

PHOTODISSOCIATION;

FLUOROCARBON;

ARTICLE; CHEMICAL MODEL; CHEMISTRY; ELECTRON; KINETICS; PRESSURE; TEMPERATURE;

ELECTRONS; FLUOROCARBONS; KINETICS; MODELS, CHEMICAL; PRESSURE; TEMPERATURE;

EID: 80051694105     PISSN: 00219606     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3614471     Document Type: Article

References (35)

1. L. G. Christophorou and J. K. Olthoff, Fundamental Electron Interactions with Plasma Processing Gases (Kluwer AcademicPlenum, New York, 2004).
2. P. Chabert, H. Abada, J.-P. Booth, and M. Lieberman, J. Appl. Phys. 94, 76 (2003). 10.1063/1.1578175
3. K. Graupner, T. A. Field, and C. A. Mayhew, New J. Phys. 12, 083035 (2010). 10.1088/1367-2630/12/8/083035
4. D. Hayashi, Jpn. J. Appl. Phys. 43, 2711 (2004). 10.1143/JJAP.43.2711
5. I. Rozum, N. J. Mason, and J. Tennyson, New J. Phys. 5, 155 (2003). 10.1088/1367-2630/5/1/155
6. N. S. Shuman, T. M. Miller, C. M. Caples, and A. A. Viggiano, J. Phys. Chem. A 114, 11100 (2010). 10.1021/jp101975a
7. J. Troe, T. M. Miller, and A. A. Viggiano, J. Chem. Phys. 127, 244303 (2007). 10.1063/1.2804761
8. J. Troe, T. M. Miller, and A. A. Viggiano, J. Chem. Phys. 127, 244304 (2007). 10.1063/1.2804762
9. A. A. Viggiano, T. M. Miller, J. F. Friedman, and J. Troe, J. Chem. Phys. 127, 244305 (2007). 10.1063/1.2804764
10. J. Troe, T. M. Miller, and A. A. Viggiano, J. Chem. Phys. 130, 244303 (2009). 10.1063/1.3149782
11. J. M. van Doren, J. F. Friedman, T. M. Miller, A. A. Viggiano, S. Denifl, P. Scheier, T. D. Mrk, and J. Troe, J. Chem. Phys. 124, 124322 (2006). 10.1063/1.2176613
12. 3. II. Dependence of the attachment rate coefficients on gas and electron temperature., Int. J. Mass Spectrom. (in press). 10.1016/j.ijms.2010.09.026
13. N. S. Shuman, T. M. Miller, A. A. Viggiano, and J. Troe, J. Chem. Phys. 134, 094310 (2011). 10.1063/1.3549139
14. H.-J. Deyerl, L. S. Alconel, and R. E. Continetti, J. Phys. Chem. A 105, 552 (2001). 10.1021/jp003137k (Pubitemid 32159662)
15. J. Csontos, Z. Rolik, S. Das, and M. Kllay, J. Phys. Chem. A 114, 13093 (2010). 10.1021/jp105268m
16. W. C. Lineberger and L. J. Puckett, Phys. Rev. 186, 116 (1969). 10.1103/PhysRev.186.116
17. S. Marienfeld, T. Sunagawa, I. I. Fabrikant, M. Braun, M.-W. Ruf, and H. Hotop, J. Chem. Phys. 124, 154316 (2006). 10.1063/1.2188939
18. J. J. Church and D. Smith, J. Phys. D 11, 2199 (1978). 10.1088/0022-3727/11/16/007
19. J. M. van Doren, T. M. Miller, A. A. Viggiano, P. panl, D. Smith, J. C. Bopp, and J. Troe, J. Chem. Phys. 128, 094309 (2008). 10.1063/1.2831767 (Pubitemid 351357793)
20. A. A. Viggiano, J. F. Friedman, N. S. Shuman, T. M. Miller, L. C. Schaffer, and J. Troe, J. Chem. Phys. 132, 194307 (2010). 10.1063/1.3427530
21. J. Troe, J. Phys. Chem. 87, 1800 (1983). 10.1021/j100233a029
22. R. V. Serauskas and E. W. Schlag, J. Chem. Phys. 42, 3009 (1965). 10.1063/1.1696370
23. J. Troe and V. G. Ushakov, J. Phys. Chem. A 110, 6732 (2006). 10.1021/jp056269s (Pubitemid 43953053)
24. W. Stevens, B. Sztaray, N. S. Shuman, T. Baer, and J. Troe, J. Phys. Chem. A 113, 573 (2009). 10.1021/jp807930k
25. J. Troe, Z. Phys. Chem. 223, 347 (2009).
26. I. I. Fabrikant and H. Hotop, Phys. Rev. A 63, 022706 (2001). 10.1103/PhysRevA.63.022706
27. E. I. Dashevskaya, I. Litvin, E. E. Nikitin, and J. Troe, Phys. Chem. Chem. Phys. 10, 1270 (2008). 10.1039/b713530k
28. E. I. Dashevskaya, I. Litvin, E. E. Nikitin, and J. Troe, J. Phys. Chem. A 115, 6825 (2011). 10.1021/jp110501n
29. I. I. Fabrikant and H. Hotop, J. Chem. Phys. 128, 124308 (2008). 10.1063/1.2841079 (Pubitemid 351474076)
30. K. Aflatooni and P. D. Burrow, J. Chem. Phys. 113, 1455 (2000). 10.1063/1.481963
31. H. Hotop, M.-W. Ruf, J. Kopyra, T. M. Miller, and I. I. Fabrikant, J. Chem. Phys. 134, 064303 (2011). 10.1063/1.3548874
32. J. Troe, J. Chem. Phys. 66, 4745 (1977). 10.1063/1.433837
33. N. I. Butkovskaya, M. N. Larichev, I. O. Leipunski, I. I. Morozov, and V. L. Talrose, Chem. Phys. Lett. 63, 375 (1979). 10.1016/0009-2614(79)87039-6
34. T. M. Miller, in Handbook of Chemistry and Physics, 85th ed., edited by, D. R. Lide, (CRC, Boca Raton, FL, 2004).
35. J. Troe, J. Chem. Phys. 79, 6017 (1983). 10.1063/1.445784