Neutral depletion in an H- source operated at high RF power and low input gas flow

Plasma Sources Science and Technology

Volumn 20, Issue 4, 2011, Pages

  McNeely, P ^a   Wunderlich D ^a  

^a MAX PLANCK INSTITUT FÜR PLASMAPHYSIK   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACKGROUND GAS; DATA SETS; GAS DENSITY; GAS FLOWS; NEUTRAL DEPLETION; NEUTRAL GAS; PLASMA IGNITION; RF-POWER;

EMISSION SPECTROSCOPY; FLOW OF GASES; GASES; ION SOURCES; OPTICAL EMISSION SPECTROSCOPY;

DENSITY OF GASES;

EID: 80051634776     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/20/4/045005     Document Type: Article

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