Ultrafast atomic layer deposition of alumina layers for solar cell passivation

Journal of the Electrochemical Society

Volumn 158, Issue 9, 2011, Pages

  Poodt, P ^a   Tiba, V ^a   Werner, F ^b   Schmidt, J ^b   Vermeer, A ^c   Roozeboom, F ^a,d  

^a TNO   (Netherlands)

^b INSTITUTE FOR SOLAR ENERGY RESEARCH HAMELIN ISFH   (Germany)

^c SoLayTec   (Netherlands)

^d EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA LAYERS; ATOMIC LAYER; HALF-REACTIONS; HIGH-THROUGHPUT; KINETIC MODELS; SOLAR-CELL APPLICATIONS; SPATIAL SEPARATION; ULTRA-FAST;

ATOMIC LAYER DEPOSITION; DEPOSITION RATES; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS;

PASSIVATION;

EID: 79960902374     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.3610994     Document Type: Article

References (16)

1. S. George, Chem. Rev., 110, 111 (2010), and references therein. 10.1021/cr900056b
2. W. M. M. Kessels, H. B. Profijt, S. E. Potts and M. C. M van de Sanden, in ALD of Nanostructured Materials, M. Knez, and, N. Pinna, Editors, VCH-Wiley, Weinheim (2011).
3. R. L. Puurunen, J. Appl. Phys., 97, 121301 (2005). 10.1063/1.1940727 (Pubitemid 40940570)
4. E. Granneman, P. Fischer, D. Pierreux, H. Terhorst, and P. Zagwijn, Surf. Coat. Technol. 201, 8899 (2007). 10.1016/j.surfcoat.2007.05.009 (Pubitemid 47224599)
5. D. J. Maas, B. van Someren, A. S. Lexmond, C. I. M. A. Spee, A. E. Duisterwinkel, and A. J. P. M. Vermeer, European Pat. 2159304 (A1) (2010) and WO Pat. 2010/024671 (2010).
6. P. Poodt, A. Lankhorst, F. Roozeboom, K. Spee, D. Maas, and A. Vermeer, Adv. Mater. 22, 3564 (2010). 10.1002/adma.201000766
7. D. H. Levy, S. F. Nelson, and D. Freeman, J. Display Technol., 5, 484 (2009). 10.1109/JDT.2009.2022770
8. J. Schmidt, A. Merkle, R. Brendel, B. Hoex, M. C. M. van de Sanden, and W. M. M. Kessels, Prog. Photovoltaics, 16, 461 (2008). 10.1002/pip.823
9. J. Benick, B. Hoex, M. C. M. van de Sanden, W. M. M. Kessels, O. Schultz, and S. W. Glunz, Appl. Phys. Lett., 92, 253504 (2008). 10.1063/1.2945287
10. W. C. Sinke, W. van Hooff, G. Coletti, B. Ehlen, G. Hahn, S. Reber, J. John, G. Beaucarne, E. van Kerschaver, M. de Wild-Scholten, and A. Metz, Proceedings of 24th EU-PVSEC, Hamburg, p. 845 (2009).
11. F. Werner, B. Veith, V. Tiba, P. Poodt, F. Roozeboom, R. Brendel, and J. Schmidt, Appl. Phys. Lett., 97 162103 (2010). 10.1063/1.3505311
12. B. Vermang, A. Rothschild, A. Racz, J. John, J. Poortmans, R. Mertens, P. Poodt, V. Tiba, F. Roozeboom, Prog. Photovoltaics, accepted.
13. V. Kuznetsov E. H. A. Granneman, P. Vermont, and K. Vanormelingen, ECS Trans. 33 (2) 441 (2010). 10.1149/1.3485280
14. D. D. Eley and E. K. Rideal, Proc. R. Soc. London, Ser. A, 178 452 (1941). 10.1098/rspa.1941.0067
15. J. Schmidt, B. Veith, F. Werner, D. Zielke, and R. Brendel, in Proceedings of 35th IEEE PVSC, Honolulu, HI, p. 885 (2010).
16. A. Vermeer and G. Janssen, WO Pat. 2011/014070 (2011)