Silicon electroosmotic micropumps for integrated circuit thermal management

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 151-154

  Laser, D J ^a   Myers, A M ^b   Shuhuai Yao, ^a   Bell, K F ^a   Goodson, K E ^a   Santiago, J G ^a   Kenny, T W ^a  

^a Stanford University   (United States)

^b INTEL CORPORATION   (United States)

Author keywords

Application specific integrated circuits; Cooling; Geometry; Integrated circuit packaging; Micropumps; Prototypes; Pumps; Silicon; Surface treatment; Thermal management

Indexed keywords

ACTUATORS; APPLICATION SPECIFIC INTEGRATED CIRCUITS; COOLING; ELECTROOSMOSIS; GEOMETRY; INTEGRATED CIRCUITS; MICROSYSTEMS; PUMPS; SILICON; SURFACE TREATMENT; TEMPERATURE CONTROL; THERMAL VARIABLES CONTROL; TRANSDUCERS;

FORCED CONVECTIVE COOLING; INHERENT RELIABILITIES; INTEGRATED CIRCUIT PACKAGING; MICRO PUMP; PROTOTYPES; SILICON SUBSTRATES; STRUCTURAL ELEMENTS; THERMAL MANAGEMENT APPLICATIONS;

SOLID-STATE SENSORS;

EID: 79960651376     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215275     Document Type: Conference Paper

References (8)

1. Yao, S., et al., Porous Glass Electroosmotic Pumps. Submitted to Journal of Colloid and Interface Science.
2. Chen, C.-H. and J.G. Santiago, A Planar Electroosmotic Micropump. Journal of Microelectromechanical Systems, 2002. 11(6): p. 672-683.
3. Laser, D.J., et al. High-Frequency Actuation with Silicon Electroosmotic Micropumps. 2002 Solid State Sensors and Actuators and Microsystems Workshop, 2002, Hilton Head, S.C.
4. Banerjee, K., et al., 3-D ICs: A Novel Chip Design for Improving Deep-Submicrometer Interconnect Performance and Systems-on-Chip Integration. Proceedings of the IEEE, 2001. 89(5): p. 602-633.
5. Zhang, L., et al., Measurements and modeling of two-phase flow in microchannels with nearly constant heat flux boundary conditions. Journal of Microelectromechanical Systems, 2002, 11(1): p. 12-19.
6. Murakami, Y. and B.B. Mikic, Parametric Optimization of Multichanneled Heat Sinks for VLSI Cooling. IEEE Transactions on Components and Packaging Technologies, 2001. 24(1): p. 2-9.
7. Hunter, R.J., Zeta Potential in Colloid Science. 1981, San Diego: Academic Press, Inc.
8. Burgreen, D. and F.R. Nakache, Electrokinetic Flow in Ultrafine Capillary Slits. J. Phys. Chemistry, 1964. 68(5): p. 1084-1091.