Conformance analysis of ASML's test process

CEUR Workshop Proceedings

Volumn 459, Issue , 2009, Pages

  Rozinat, A ^a   De Jong, I S M ^b   Gunther C W ^a   Van Der Aalst, W M P ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

Author keywords

Case study; Conformance checking; Process mining

Indexed keywords

AUTOMATED DISCOVERY; CONFORMANCE CHECKING; MODEL-BASED ANALYSIS; NORMATIVE PROCESS; PROCESS MINING; PROCESS MODEL; REFERENCE MODELING; WAFER SCANNER;

DATA MINING; REGULATORY COMPLIANCE; RESEARCH;

TESTING;

EID: 79960258031     PISSN: 16130073     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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