Process mining applied to the test process of wafer scanners in ASML

IEEE Transactions on Systems, Man and Cybernetics Part C: Applications and Reviews

Volumn 39, Issue 4, 2009, Pages 474-479

  Rozinat, A ^a   de Jong, Ivo S M ^b   Gunther C W ^a   van der Aalst, W M P ^a  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b ASML   (Netherlands)

Author keywords

Case study; Process mining; Test process optimization

Indexed keywords

ADMINISTRATIVE PROCESS; CASE STUDY; PROCESS MINING; PROCESS MODEL; STRUCTURED PROCESS; SUCCESSFUL CASE; TEST PROCESS; TEST PROCESS OPTIMIZATION; WAFER SCANNER;

INFORMATION USE; PROCESS CONTROL; SCANNING; TESTING;

MINING;

EID: 67649248954     PISSN: 10946977     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSMCC.2009.2014169     Document Type: Article

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