Fabrication of large area fishnet optical metamaterial structures operational at near-IR wavelengths

Materials

Volumn 3, Issue 12, 2010, Pages 5283-5292

  Dutta, Neilanjan ^a   Mirza, Iftekhar O ^a   Shi, Shouyuan ^a   Prather, Dennis W ^a  

^a UNIVERSITY OF DELAWARE   (United States)

Author keywords

Deep UV lithography; Fishnet metamaterial; Lift off process; Negative refraction

Indexed keywords

DEEP-UV LITHOGRAPHY; DRY ETCHING PROCESS; FABRICATION PROCESS; LIFT-OFF PROCESS; METAMATERIAL STRUCTURES; NEGATIVE REFRACTIONS; OPTICAL METAMATERIALS; SACRIFICIAL TEMPLATES;

CMOS INTEGRATED CIRCUITS; METAMATERIALS; OPTICAL MATERIALS; QUARTZ; SILICON WAFERS; SPACE TELESCOPES;

FABRICATION;

EID: 79960085505     PISSN: None     EISSN: 19961944     Source Type: Journal    
DOI: 10.3390/ma3125283     Document Type: Article

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