SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 1779-1781

Tin oxide nanosensors for highly sensitive toxic gas detection and their 3D system integration

(8) Griessler, C a Brunet, E a Maier, T a Steinhauer, S a Kock A a Jordi, T b Schrank, F b Schrems, M b

a AIT AUSTRIAN INSTITUTE OF TECHNOLOGY (Austria)

b AMS AG (Austria)

Author keywords

3D system integration; Gas sensors; Nanosensors; Toxic gases

Indexed keywords

3-D SYSTEM INTEGRATION; CMOS CHIPS; CMOS TECHNOLOGY; DAILY LIVES; GAS CONCENTRATION; GAS DETECTION; HIGHLY SENSITIVE; MICRO HOTPLATE; MICROHOTPLATES; OPERATING TEMPERATURE; PYROLYSIS PROCESS; ROADMAP; SENSING FILMS; SENSING LAYERS; SENSOR RESISTANCE; SI SUBSTRATES; SYSTEM INTEGRATION; THROUGH-SILICON-VIA; TOXIC GAS; ULTRA-THIN;

CHEMICAL SENSORS; CMOS INTEGRATED CIRCUITS; GAS DETECTORS; GASES; INTEGRATION; OXIDE FILMS; SPRAY PYROLYSIS; SULFUR DIOXIDE; THREE DIMENSIONAL; TIN; TIN OXIDES; TOXIC MATERIALS; ULTRATHIN FILMS;

NANOSENSORS;

EID: 79960041609 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/j.mee.2011.02.017 Document Type: Conference Paper

Times cited : (30)

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