GasFET for the detection of reducing gases

Sensors and Actuators, B: Chemical

Volumn 111-112, Issue SUPPL., 2005, Pages 106-110

  Lampe, U ^a   Simon, E ^a   Pohle, R ^a   Fleischer, M ^a   Meixner, H ^a   Frerichs, H P ^b   Lehmann, M ^b   Kiss, G ^c  

^a SIEMENS AG   (Germany)

^b Micronas GmbH Freiburg   (Germany)

^c TU Institute of Building Constructions and Sanitary Engineering Budapest   (Hungary)

Author keywords

Field effect transistor; Low power work function type gas sensor; Reducing gases

Indexed keywords

ATMOSPHERIC HUMIDITY; CONCENTRATION (PROCESS); FIELD EFFECT TRANSISTORS; GALLIUM COMPOUNDS; GASES; OXYGEN; PALLADIUM; TEMPERATURE DISTRIBUTION; THICK FILMS; THIN FILMS; TIN COMPOUNDS;

KELVIN PROBE; LOW POWER WORK FUNCTION TYPE GAS SENSOR; REDUCING GASES;

CHEMICAL SENSORS;

EID: 25144488675     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2005.06.041     Document Type: Conference Paper

References (4)

1. M. Fleischer Low-power gas sensors based on work function measurement in low-cost hybrid flip-chip technology Sens. Actuators B 80 2001 169 173
2. R. Pohle Realization of a new sensor concept: improved CCFET and SGFET type gas sensors in hybrid flip-chip technology Transducers Conference Boston, 9-12 June 2003
3. E. Simon Novel carbon dioxide gas sensor based on field effect Transistors Conf. Proc. Eurosensors XVII Portugal, 21-24 September 2003
4. E. Simon Detection of breath gases via gas sensitive field effect transistors for asthma diagnosis Conf. Proc. 7th Conference of European Society for Engineering and Medicine (ESEM) Germany, 18-21 September 2003