GaN, GaAs and Silicon based Micromechanical Free Standing Hot Plates for Gas Sensors

Procedia Chemistry

Volumn 1, Issue 1, 2009, Pages 804-807

  Jakovenko, J ^a   Lalinsky, T ^b   Drzik, M ^c   Ivanova, M ^d   Vanko, G ^b   Husak, M ^a  

^a CZECH TECHNICAL UNIVERSITY IN PRAGUE   (Czech Republic)

^b INSTITUTE OF ELECTRICAL ENGINEERING   (Slovakia)

^c INTERNATIONAL LASER CENTER   (Slovakia)

^d TECHNICAL UNIVERSITY OF SOFIA   (Bulgaria)

Author keywords

MEMS hot plate, Gas sensor

Indexed keywords

GAAS; GAN MESFET; GAS SENSORS; HIGH TEMPERATURE; HOT PLATES; METAL OXIDE GAS SENSORS; MICRO-MECHANICAL; ONE CHIP; PROCESSING TECHNOLOGIES; SIGNAL PROCESSING ELECTRONICS; SILICON-BASED; SUSPENDED MEMBRANES; TEMPERATURE RANGE; THERMAL AND MECHANICAL PROPERTIES; THERMAL CONVERTERS;

CHEMICAL SENSORS; GALLIUM NITRIDE; GAS DETECTORS; GASES; HIGH ELECTRON MOBILITY TRANSISTORS; HYDROCARBONS; MECHANICAL PROPERTIES; MEMS; MESFET DEVICES; METALLIC COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PLATE METAL; SEMICONDUCTING GALLIUM; SIGNAL PROCESSING;

GALLIUM ALLOYS;

EID: 71549135850     PISSN: 18766196     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1016/j.proche.2009.07.200     Document Type: Conference Paper

References (4)

1. I. Simon, N. Barsan, M. Bauer, U. Weimar. Micromachined metal oxide gas sensors. Opportunities to improve sensor performance, Sensors and Actuators B, 2001, p. 1-26.
2. V. Chimalla, J. Petzoldt, O. Ambacher. Group III nitride and SiC based MEMS and NEMS: materials properties, technology and applications. Journal of Physics D: Application Physics. ISSN: 6386-6434. 2007. p 6386-6434.
3. Lalinsky T., Drzik M., and Jakovenko J. Sensors and Actuators A 142 (2008) 147-152
4. Vanko, T. Lalinský, Š. Haščík, I.Rýger, Ţ. Mozolová, J. Škriniarová, M. Tomáška, I. Kostič, A. Vincze, Vacuum (2009) in print