Characterisation of the deflection of thin perforated SiN membranes of micro-hole array chips used for the cell selection

Microelectronic Engineering

Volumn 88, Issue 8, 2011, Pages 1782-1784

  Kurz, Christian M ^a   Thielecke, Hagen ^a  

^a FRAUNHOFER INSTITUTE FOR BIOMEDICAL ENGINEERING   (Germany)

Author keywords

Cell micro hole array; Cell picking; Membrane deflection

Indexed keywords

CAPILLARY SYSTEM; CELL LINES; CELL SELECTION; CHARACTERISATION; FLUIDIC SYSTEMS; LIFE-SCIENCES; MEMBRANE DEFLECTION; MICRO HOLES; NITRIDE MEMBRANES; RELIABLE CONTROL; SEMI-SOLIDS; SILICON NITRIDE MEMBRANE; SINGLE CELLS; SUCTION PRESSURES;

CELL CULTURE; MEMBRANES; SILICON NITRIDE;

CLONE CELLS;

EID: 79960032600     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2010.12.066     Document Type: Conference Paper

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