A high signal-to-noise ratio toroidal electron spectrometer for the SEM

Ultramicroscopy

Volumn 111, Issue 8, 2011, Pages 1093-1100

  Hoang, H Q ^a   Osterberg, M ^a   Khursheed, A ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Backscattered electron spectrum; Scanning electron microscope; Secondary electron spectrum; Toroidal electron energy spectrometer; Voltage contrast

Indexed keywords

BACKSCATTERED ELECTRONS; SCANNING ELECTRON MICROSCOPE; SECONDARY ELECTRONS; TOROIDAL ELECTRON ENERGY SPECTROMETER; VOLTAGE CONTRAST;

ATOMIC SPECTROSCOPY; ATOMS; BACKSCATTERING; DISSOCIATION; ELECTRON ENERGY LEVELS; ELECTRON MICROSCOPES; ELECTRON SCATTERING; FADING (RADIO); SCANNING ELECTRON MICROSCOPY; SECONDARY EMISSION; SIGNAL TO NOISE RATIO; SPECTROMETERS; SPECTROMETRY;

ELECTRONS;

PALLADIUM; SILVER;

ACCURACY; ALGORITHM; ARTICLE; ATOMIC PARTICLE; CONTROLLED STUDY; ELECTRIC CURRENT; ELECTRIC POTENTIAL; EQUIPMENT DESIGN; MATHEMATICAL COMPUTING; MATHEMATICAL MODEL; MOLECULAR ELECTRONICS; NANOANALYSIS; QUANTITATIVE ANALYSIS; SCANNING ELECTRON MICROSCOPY; SIGNAL NOISE RATIO; SPECTROMETER; SURFACE CHARGE;

EID: 79959995028     PISSN: 03043991     EISSN: 18792723     Source Type: Journal    
DOI: 10.1016/j.ultramic.2011.06.003     Document Type: Article

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