Experimental results from a second-order focusing toroidal energy spectrometer attachment for scanning electron microscopes

Nuclear Instruments and Methods in Physics Research, Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Volumn 645, Issue 1, 2011, Pages 241-244

  Hoang, H Q ^a   Osterberg, M ^a   Khursheed, A ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Energy electron spectrometer; Scanning electron microscopy; Toroidal spectrometer

Indexed keywords

ANGULAR SPREADS; BACKSCATTERED ELECTRONS; ELECTRON SPECTROMETER; ENERGY RESOLUTIONS; EXPERIMENTAL CONFIRMATION; FOCUSING OPTICS; SCANNING ELECTRON MICROSCOPE; SCANNING ELECTRON MICROSCOPES; SCANNING ELECTRONS; SECOND-ORDER FOCUSING; SECONDARY ELECTRONS; TOROIDAL ENERGY; TOROIDAL SPECTROMETER;

ELECTRON MICROSCOPES; ELECTRONS; FOCUSING; SCANNING ELECTRON MICROSCOPY; SPECTROMETERS;

SPECTROMETRY;

EID: 79958240532     PISSN: 01689002     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nima.2010.12.010     Document Type: Conference Paper

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3. H.Z. Sar-El Rev. Sci. Instr. 41 1970 561
4. Lorentz, 2EM, Integrated Engineering Software Inc.; Canada.