Characterization of reactively sputtered permeation barrier materials on polymer substrates

Surface and Coatings Technology

Volumn 205, Issue SUPPL. 2, 2011, Pages

  Fahlteich, John ^a   Schönberger, Waldemar ^a   Fahland, Matthias ^a   Schiller, Nicolas ^a  

^a Fraunhofer Institute for Electron Beam and Plasma Technology   (Germany)

Author keywords

Aluminum oxide; Encapsulation; Permeation barrier; Reactive sputtering; Structural properties; Zinc oxide; Zinc tin oxide

Indexed keywords

ALUMINUM OXIDES; AMORPHOUS TITANIUM OXIDE; BARRIER LAYERS; COLUMNAR STRUCTURES; COMPACT STRUCTURES; DUAL MAGNETRON SPUTTERING; FLEXIBLE ELECTRONIC DEVICES; FOOD PACKAGING; GAS PERMEATION; HIGH QUALITY; LAYER STRUCTURES; LAYER THICKNESS; METAL OXIDE LAYERS; OXIDE LAYER; OXYGEN PERMEATION; PERMEATION BARRIER; PERMEATION BARRIER MATERIALS; PERMEATION BARRIERS; POLYCRYSTALLINE; POLYMER SUBSTRATE; SECTION IMAGE; TITANIUM OXIDE LAYER; WATER VAPOR PERMEATION; XRD; ZINC-TIN OXIDE;

ALUMINUM; AMORPHOUS MATERIALS; ATOMIC FORCE MICROSCOPY; CHARACTERIZATION; CRYSTAL ATOMIC STRUCTURE; METALLIC COMPOUNDS; OXIDES; OXYGEN; OXYGEN PERMEABLE MEMBRANES; PACKAGING MATERIALS; POLYETHYLENE TEREPHTHALATES; SCANNING ELECTRON MICROSCOPY; STRUCTURAL PROPERTIES; SURFACE PROPERTIES; SURFACE STRUCTURE; TIN; TIN OXIDES; TITANIUM; WATER VAPOR; X RAY DIFFRACTION; X RAY DIFFRACTION ANALYSIS; ZINC; ZINC OXIDE;

TITANIUM OXIDES;

EID: 79959773433     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2011.01.045     Document Type: Article

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