Determining coherence length of X-ray beam using line grating structures

ECS Transactions

Volumn 34, Issue 1, 2011, Pages 931-936

  Lee, Hae Jeong ^a   Soles, Christopher L ^a   Wu, Wen Li ^a  

^a NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AZIMUTHAL ANGLE; BREAK DOWN; COHERENCE LENGTHS; COHERENT LENGTH; CROSS SECTION; EFFECTIVE MEDIUM APPROXIMATION; FLAT SUBSTRATES; INCIDENT ANGLES; LINE GRATING; LINEAR GRATINGS; NANO PATTERN; SPECULAR X-RAY REFLECTIVITIES; X RAY BEAM;

DATA REDUCTION; DIELECTRIC MATERIALS; DIFFRACTION GRATINGS; REFLECTOMETERS; SEMICONDUCTOR DEVICE MANUFACTURE; X RAY OPTICS;

X RAYS;

EID: 79959654771     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.3567694     Document Type: Conference Paper

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