Annealing effect on the optical properties of implanted silicon in a silicon nitride matrix

Applied Physics Letters

Volumn 93, Issue 2, 2008, Pages

  Cen, Z H ^a   Chen, T P ^a   Ding, L ^a   Liu, Y ^d   Yang, M ^a   Wong, J I ^a   Liu, Z ^a   Liu, Y C ^b   Fung, S ^c  

^a NANYANG TECHNOLOGICAL UNIVERSITY   (Singapore)

^b SINGAPORE INSTITUTE OF MANUFACTURING TECHNOLOGY   (Singapore)

^c UNIVERSITY OF HONG KONG   (Hong Kong)

^d NONE

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; NITRIDES; NONMETALS; OPTICAL MATERIALS; OPTICAL PROPERTIES; SEMICONDUCTING CADMIUM TELLURIDE; SILICON NITRIDE;

ANNEALING EFFECTS; OPTICAL (PET) (OPET); SILICON NITRIDE MATRIX;

SILICON;

EID: 47549115582     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2962989     Document Type: Article

References (14)

1. B. H. Kim, C. H. Cho, T. W. Kim, N. M. Parka, G. Y. Sung, and S. J. Park, Appl. Phys. Lett. 86, 091908 (2005).
2. L. Dal Negro, J. H. Yi, L. C. Kimerling, S. Hamel, A. Williamson, and G. Galli, Appl. Phys. Lett. 88, 183103 (2006).
3. R. Huang, K. J. Chen, H. P. Dong, D. Q. Wang, H. L. Ding, W. Li, J. Xu, Z. Y. Ma, and L. Xu, Appl. Phys. Lett. 91, 111104 (2007).
4. T. P. Chen, Y. Liu, M. S. Tse, O. K. Tan, P. F. Ho, K. Y. Liu, D. Gui, and A. L. K. Tan, Phys. Rev. B 68, 153301 (2003).
5. L. Ding, T. P. Chen, Y. Liu, C. Y. Ng, and S. Fung, Phys. Rev. B 72, 125419 (2005).
6. D. A. G. Bruggeman, Ann. Phys. 24, 636 (1935).
7. G. E. Jellison and F. A. Modine, Appl. Phys. Lett. 69, 371 (1996).
8. D. Amans, S. Callard, A. Gagnaire, J. Joseph, G. Ledoux, and F. Huisken, J. Appl. Phys. 93, 4173 (2003).
9. M. Losurdo, M. M. Giangregorio, P. Capezzuto, G. Bruno, M. F. Cerqueira, E. Alves, and M. Stepikhova, Appl. Phys. Lett. 82, 2993 (2003).
10. Handbook of Optical Constants of Solids, edited by, E. D. Palik, (Academic, New York, 1985).
11. C. M. Herzinger, B. Johs, W. A. McGahan, J. A. Wollam, and W. Paulson, J. Appl. Phys. 83, 3323 (1998).
12. C. Q. Sun, Prog. Solid State Chem. 35, 1 (2007).
13. B. Gallas and J. Rivory, J. Appl. Phys. 94, 2248 (2003).
14. B. Gallas, I. Stenger, C. C. Kao, S. Fisson, G. Vuye, and J. Rivory, Phys. Rev. B 72, 155319 (2005).