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Journal of Applied Physics

Volumn 109, Issue 11, 2011, Pages

Internal structure of 0.9 GHz microplasma

(2) Miura, Naoto a Hopwood, Jeffrey a

a Tufts University (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AVERAGE TEMPERATURE; ELECTRON DENSITY PROFILES; EMISSION SPECTROMETRY; GAS TEMPERATURE; GAS TEMPERATURE MEASUREMENTS; INPUT POWER; INTERNAL STRUCTURE; LOW POWER; METASTABLE ATOMS; MICRO-PLASMAS; MICRODISCHARGES; NITROGEN EMISSIONS; NON EQUILIBRIUM; NUMERICAL HEAT TRANSFER; PLASMA POWER; ROTATIONAL SPECTRA; SPLIT-RING RESONATOR;

ABSORPTION; ABSORPTION SPECTROSCOPY; ATOMIC SPECTROSCOPY; BANDPASS FILTERS; CARRIER CONCENTRATION; CCD CAMERAS; DENSITY FUNCTIONAL THEORY; ELECTRON DENSITY MEASUREMENT; GLOW DISCHARGES; HEAT TRANSFER; METAMATERIALS; NITROGEN; NITROGEN PLASMA; PLASMA DEVICES; TEMPERATURE MEASUREMENT;

ARGON;

EID: 79959444741 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.3592269 Document Type: Article

Times cited : (27)

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