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Volumn 80, Issue 2, 2009, Pages
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Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON;
ATOMIC SPECTROSCOPY;
BANDPASS FILTERS;
CHARGE COUPLED DEVICES;
EMISSION SPECTROSCOPY;
GEOMETRICAL OPTICS;
INTEGRATED CIRCUITS;
MOLECULAR SPECTROSCOPY;
OPTICAL EMISSION SPECTROSCOPY;
OPTICAL FILTERS;
PLASMA DEVICES;
PLASMA DISPLAY DEVICES;
RADIATION DAMAGE;
SIGNAL PROCESSING;
SIZE DISTRIBUTION;
CHROMATIC ABERRATIONS;
DIAGNOSTIC SYSTEMS;
ELECTRON MULTIPLYING CHARGE COUPLED DEVICES;
INTENSITY DISTRIBUTIONS;
MAXIMUM RESOLUTIONS;
MICRO PLASMAS;
MIRROR SYSTEMS;
OPTICAL DIFFRACTIONS;
OPTIMAL CONDITIONS;
PIXEL SIZES;
SPATIAL DISTRIBUTIONS;
SPATIAL NONUNIFORMITY;
SPATIAL RESOLUTIONS;
SPATIALLY RESOLVED;
SPATIALLY RESOLVED OPTICAL EMISSIONS;
TIME-AVERAGED;
INTEGRATED OPTOELECTRONICS;
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EID: 61449201308
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.3079379 Document Type: Article |
Times cited : (9)
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References (19)
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