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Volumn 80, Issue 2, 2009, Pages

Chromatic-free spatially resolved optical emission spectroscopy diagnostics for microplasma

Author keywords

[No Author keywords available]

Indexed keywords

ARGON; ATOMIC SPECTROSCOPY; BANDPASS FILTERS; CHARGE COUPLED DEVICES; EMISSION SPECTROSCOPY; GEOMETRICAL OPTICS; INTEGRATED CIRCUITS; MOLECULAR SPECTROSCOPY; OPTICAL EMISSION SPECTROSCOPY; OPTICAL FILTERS; PLASMA DEVICES; PLASMA DISPLAY DEVICES; RADIATION DAMAGE; SIGNAL PROCESSING; SIZE DISTRIBUTION;

EID: 61449201308     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3079379     Document Type: Article
Times cited : (9)

References (19)
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  • 6
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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.