Hot wire chemical vapour deposition (HWCVD) of boron carbide thin films from ortho-carborane for neutron detection application

Thin Solid Films

Volumn 519, Issue 14, 2011, Pages 4561-4564

  Chaudhari, Pradip ^a   Meshram, Nagsen ^a   Singh, Arvind ^b   Topkar, Anita ^b   Dusane, Rajiv ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY BOMBAY   (India)

^b BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

Boron carbide; HWCVD; Neutron detector; Ortho carborane (o C2B10H 12); PECVD; SIMS

Indexed keywords

CARRIER GAS; CHEMICAL BONDING CONFIGURATION; CHEMICAL VAPOUR DEPOSITION; HOST MATRICES; HOT WIRES; HWCVD; NEUTRON CAPTURE; NEUTRON DETECTION; ORTHO-CARBORANE (O-C2B10H 12); SECONDARY ION MASS SPECTROSCOPY; SILICON SUBSTRATES; X-RAY DIFFRACTION SPECTROSCOPY;

ARGON; BORON; CHEMICAL BONDS; CHEMICAL DETECTION; CHEMICAL VAPOR DEPOSITION; DEPOSITION; DETECTORS; FOURIER TRANSFORMS; NEUTRON DETECTORS; NEUTRONS; SECONDARY ION MASS SPECTROMETRY; THIN FILMS; X RAY DIFFRACTION;

BORON CARBIDE;

EID: 79958849100     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.01.295     Document Type: Conference Paper

References (18)

1. Francois Thevenot J. Eur. Ceram. Soc. 6 1990 205
2. G.F. Knoll Radiation and Detection Measurement 2nd Edition 1989 Wiley New York
3. S. Adenwalla, P. Welsch, A. Harken, J.I. Brand, A. Sezer, and B.W. Robertson Appl. Phys. Lett. 79 2001 4357
4. H. Wiesmann, A.K. Gosh, T. McMahon, and M. Strongin J. Appl. Phys. 50 1979 3752
5. H. Matsumura Jpn. J. Appl. Phys. 25 1986 L949
6. J. Doyle, R. Robertson, G.H. Lin, M.Z. He, and A. Gallagher J. Appl. Phys. 64 1988 3215
7. R.O. Dusane Thin Solid Films 516 2008 779
8. A.S. Kumbhar, D.M. Bhusari, and S.T. Kshirsagar Appl. Phys. Lett. 66 1995 1741
9. R.O. Dusane, Frank Diehl, U. Weber, and B. Schroder Thin Solid Films 395 2001 202
10. R.O. Dusane, S.R. Dusane, V.G. Bhide, and S.T. Khsirsagar Appl. Phys. Lett. 63 1993 2201
11. B.W. Robertson, S. Adenwalla, A. Harken, P. Welsch, J.I. Brand, P.A. Dowben, and J.P. Claassen Appl. Phys. Lett. 80 2002 3644
12. S.V. Deshpande, E. Gulari, S.J. Harris, and A.M. Weiner Appl. Phys. Lett. 65 1994 1757
13. Yu.M. Grigorev, A.V. Zharkov, A.S. Mukasyan, and V.A. Shugaev Inorg. Mater. 29 1993 359
14. S.V. Ivanov, K.A. Solntsev, and N.T. Kuznetsov Russ. J. Inorg. Chem. 37 1992
15. Koun Shirai, Shuichi Emura, Shunichi Gonda, and Yukinobu Kumashiro J. Appl. Phys. 78 1995 3392
16. H. Werheit, T. Au, R. Schmechel, S.O. Shalamberidze, G.I. Kalandadze, and A.M. Eristavi J. Solid State Chem. 154 1999 79
17. Udo Kuhlmann, and Helmut Werheit J. Alloys Compd. 205 1994 87
18. D.R. Tallant, T.L. Aselage, A.N. Campbell, and D. Emin Phys. Rev. B 40 1989 5649