Efficacy of using multiple open-path Fourier transform infrared (OP-FTIR) spectrometers in an odor emission episode investigation at a semiconductor manufacturing plant

Science of the Total Environment

Volumn 409, Issue 17, 2011, Pages 3158-3165

  Tsao, Yung Chieh ^a   Wu, Chang Fu ^a   Chang, Pao Erh ^b   Chen, Shin Yu ^b   Hwang, Yaw Huei ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

^b INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Odor episode; Open path Fourier transform infrared; Semiconductor

Indexed keywords

BUTYL ACETATE; CHEMICAL MONITORING; CHEMICAL RELEASE; CONFIDENCE INTERVAL; EJECTION VELOCITY; EMISSION SOURCES; FOURIER TRANSFORM INFRARED; HIGH EFFICACY; LOGISTIC REGRESSION MODELS; MONITORING PERFORMANCE; MONITORING TIME; MONOMETHYL ETHERS; MULTIPLE-PATH; ODDS RATIOS; ODOR COMPOUNDS; ODOR EMISSION; OP-FTIR; OPEN-PATH; PREVAILING WINDS; PROPYLENE GLYCOLS; SEMICONDUCTOR; SEMICONDUCTOR MANUFACTURING;

AMMONIA; CHEMICAL DETECTION; ETHERS; GLYCOLS; INDUSTRIAL EMISSIONS; MANUFACTURE; MONITORING; ODOR CONTROL; OZONE; PROPYLENE; REGRESSION ANALYSIS; SEMICONDUCTOR DEVICE MANUFACTURE; SPECTROMETERS; SPECTROMETRY; VOLATILE FATTY ACIDS;

FOURIER TRANSFORMS;

AMMONIA; ESTER; HEXANOIC ACID; OZONE; PROPYLENE GLYCOL; PROPYLENE GLYCOL METHYL ETHER ACETATE; UNCLASSIFIED DRUG;

DETECTION METHOD; EFFICIENCY MEASUREMENT; EMISSION INVENTORY; FTIR SPECTROSCOPY; INDUSTRIAL EMISSION; MANUFACTURING; ODOR; PERFORMANCE ASSESSMENT; POLLUTION MONITORING;

AIR POLLUTION INDICATOR; ALTITUDE; ARTICLE; CHEMICAL INDUSTRY; ELECTRONICS INDUSTRY; FLOW RATE; FOURIER ANALYSIS; GEOGRAPHIC DISTRIBUTION; POLLUTION MONITORING; PRIORITY JOURNAL; SEMICONDUCTOR; WIND;

ACETATES; AIR POLLUTANTS; AIR POLLUTION; ALKENES; AMMONIA; ENVIRONMENTAL MONITORING; ODORS; OZONE; PROPYLENE GLYCOL; PROPYLENE GLYCOLS; SEMICONDUCTORS; SPECTROSCOPY, FOURIER TRANSFORM INFRARED; WIND;

EID: 79958816044     PISSN: 00489697     EISSN: 18791026     Source Type: Journal    
DOI: 10.1016/j.scitotenv.2011.04.052     Document Type: Article

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