Ion implantation techniques for non-electronic applications

Vacuum

Volumn 85, Issue 12, 2011, Pages 1125-1129

  Garcia J A ^a   Rodriguez R J ^a  

^a AIN Centro de Ingenieria Avanzada de Superficies   (Spain)

Author keywords

Biocompatibility; Ion implantation; Plasma immersion; Tribology

Indexed keywords

IMPLANTATION TECHNIQUE; INDUSTRIAL SECTOR; ION BEAM TECHNIQUE; METALLURGICAL APPLICATIONS; NAVAL RESEARCH LABORATORY; NITROGEN IMPLANTATION; PLASMA IMMERSION; PLASMA IMMERSION ION IMPLANTATION;

BIOCOMPATIBILITY; BIOLOGICAL MATERIALS; INDUSTRIAL APPLICATIONS; ION BEAMS; IONS; PLASMA APPLICATIONS; RESEARCH LABORATORIES; SURFACE PROPERTIES;

ION IMPLANTATION;

EID: 79958806161     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2010.12.024     Document Type: Conference Paper

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