Thin-film aerogel thermal conductivity measurements via 3ω

Journal of Non-Crystalline Solids

Volumn 357, Issue 15, 2011, Pages 2960-2965

  Bauer, M L ^a   Bauer, C M ^a   Fish, M C ^a   Matthews, R E ^a   Garner, G T ^a   Litchenberger, A W ^a   Norris, P M ^a  

^a University of Virginia   (United States)

Author keywords

3 technique; Thermal conductivity; Thin film aerogel

Indexed keywords

DEPOSITION CONDITIONS; DEPOSITION PROCESS; FABRICATION PROCESS; MICROELECTRONIC SYSTEMS; SILICA AEROGELS; THERMAL CONDUCTIVITY MEASUREMENTS; THERMAL INSULATORS; THERMAL ISOLATION; THIN-FILM AEROGEL;

AEROGELS; MEMS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; SILICA; SILICA GEL;

THERMAL CONDUCTIVITY OF SOLIDS;

EID: 79958778155     PISSN: 00223093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnoncrysol.2011.03.042     Document Type: Article

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