Optical rib waveguides based on sol-gel derived silica-titania films

Thin Solid Films

Volumn 519, Issue 16, 2011, Pages 5544-5551

  Karasinski P ^a   Tyszkiewicz, C ^a   Rogozinski R ^a   Jaglarz, J ^b   J mazur, ^a  

^a SILESIAN UNIVERSITY OF TECHNOLOGY   (Poland)

^b CRACOW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

Planar waveguides; Rib waveguides; Silica titania films; Sol gel process

Indexed keywords

CHANNEL WAVEGUIDE; CHEMICAL WET ETCHING; ETCHING PROCESS; EXPERIMENTAL RESEARCH; RIB WAVEGUIDES; SILICA-TITANIA; SILICA-TITANIA FILM; SILICA-TITANIA FILMS; SINGLE MODE; SLAB WAVEGUIDES; TIO; WATER SOLUTIONS; WAVEGUIDE FILMS;

GELS; METALLIC FILMS; PHOTORESISTS; PLASMA FILLED WAVEGUIDES; SILICA; SILICON COMPOUNDS; SOL-GEL PROCESS; SOL-GELS; SOLS; TITANIUM DIOXIDE; WET ETCHING;

WAVEGUIDES;

EID: 79957987404     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2011.02.064     Document Type: Article

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