Semiconductor nanomembranes: A platform for new science and technology

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8031, Issue , 2011, Pages

  Lagally, M G ^a   Kiefer, A M ^a   Paskiewicz, D M ^a   Cavallo, F ^a   Scott, S A ^a   Ma, Z Q ^a   Savage, D E ^a  

^a UNIVERSITY OF WISCONSIN MADISON   (United States)

Author keywords

heteroepitaxy; integration; Nanomembranes; semiconductor; strain engineering

Indexed keywords

HETEROEPITAXY; NANOMEMBRANES; NEW SCIENCE; SEMICONDUCTOR; STRAIN ENGINEERING;

EPITAXIAL GROWTH; MATERIALS PROPERTIES; MEMBRANES; SENSORS;

NANOSTRUCTURES;

EID: 79957978981     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.884810     Document Type: Conference Paper

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