Development of embedded heatsinking layers for compact arrays of X-ray TES microcalorimeters

IEEE Transactions on Applied Superconductivity

Volumn 21, Issue 3 PART 1, 2011, Pages 223-226

  Finkbeiner, F M ^a   Bailey, C N ^a   Bandler, S R ^a   Brekosky, R P ^a,b   Brown, A D ^a   Chervenak, J A ^a   Eckart, M E ^a   Kelley, R L ^a   Kelly, D P ^a,c   Kilbourne, C A ^a   Porter, F S ^a   Sadleir, J E ^a,d   Smith, S J ^a,e  

^a NASA GODDARD SPACE FLIGHT CENTER   (United States)

^b NORTHROP GRUMMAN CORPORATION   (United States)

^c MEI Technologies   (United States)

^d UNIVERSITY OF ILLINOIS AT URBANA CHAMPAIGN   (United States)

^e UNIVERSITY OF MARYLAND BALTIMORE COUNTY   (United States)

Author keywords

Diffusion barrier; Heatsinking; Superconducting; X ray microcalorimeter

Indexed keywords

ARRAY PERFORMANCE; BIAS POWER; COMPACT ARRAYS; COPPER LAYER; COPPER MIGRATION; COVER LAYERS; FABRICATION PROCESS; HEATSINKING; HIGH QUALITY; HIGH TEMPERATURE; LARGE FORMAT; LOCAL HEATING; MAGNETIC FIELD SENSITIVITY; MICRO-CALORIMETER ARRAY; MICRO-CALORIMETERS; SILICON SUBSTRATES; STRAY INDUCTANCES; SUPERCONDUCTING; SUPERCONDUCTING GROUND PLANE; SURROUNDING MATERIALS; THERMAL CROSSTALK; TRANSITION-EDGE SENSORS; X-RAY MICROCALORIMETER;

ANTENNAS; CALORIMETERS; COPPER; DETECTOR CIRCUITS; FILM GROWTH; MAGNETIC FIELDS; REFRACTORY METALS; SILICON COMPOUNDS; SILICON OXIDES; SUPERCONDUCTING MATERIALS; SUPERCONDUCTIVITY; X RAYS;

DIFFUSION BARRIERS;

EID: 79957967656     PISSN: 10518223     EISSN: None     Source Type: Journal    
DOI: 10.1109/TASC.2010.2091237     Document Type: Conference Paper

References (11)

1. S. R. Bandler, C. N. Bailey, J. A. Bookbinder, E. E. DeLuca, J. A. Chervenak, M. E. Eckart, F. M. Finkbeiner, R. L. Kelley, C. A. Kilbourne, F. S. Porter, J. E. Sadleir, S. J. Smith, and R. K. Smith, "High spectral resolution, high cadence, imaging x-ray, microcalorimeters for solar physics," in Proc. SPIE, 2010, vol. 7011, p. 7732-178.
2. C. A. Kilbourne, W. B. Doriese, S. R. Bandler, R. P. Brekosky, A.-D. Brown, J. A. Chervenak, M. E. Eckart, F. M. Finkbeiner, G. C. Hilton, K. D. Irwin, N. Iyomoto, R. L. Kelley, F. S. Porter, C. D. Reintsema, S. J. Smith, and J. N. Ullom, "Multiplexed read-out of uniform arrays of TES x-ray microcalorimters suitable for Constellation-X," in Proc. SPIE, 2008, vol. 7011, p. 701104.
3. N. Iyomoto, S. R. Bandler, R. P. Brekosky, A.-D. Brown, J. A. Chervenak, M. E. Eckart, F. M. Finkbeiner, R. L. Kelley, C. A. Kilbourne, F. S. Porter, J. E. Sadleir, and S. J. Smith, "Heat sinking, crosstalk, temperature stability for large close-packed array of microcalorimeters," IEEE Trans. Applied Superconductivity, vol. 19, no. 3, pp. 557-560, 2009.
4. S. J. Smith, J. S. Adams, S. R. Bandler, R. P. Brekosky, A.-D. Brown, J. A. Chervenak, M. E. Eckart, F. M. Finkbeiner, R. L. Kelley, C. A. Kilbourne, F. S. Porter, and J. E. Sadleir, "Optimizing transition-edge sensor design for high count-rate applications," in AIP Conference Proc., 2009, vol. 1185, pp. 23-26.
5. H. Y. Wong, N. F. Mohd Shukor, and N. Amin, "Prospective development in diffusion barrier layers for copper metallization in LSI," Microelectronics Journal, vol. 38, pp. 777-782, 2007. (Pubitemid 47175981)
6. J. H. Wu, J. Schlovin, and J. A. del Alamo, "A through-wafer interconnect in silicon for RFICs," IEEE Trans. Electron Devices, vol. 51, no. 11, Nov. 2004.
7. P. Majumder and C. Takoudis, "Thermal stability of Ti/Mo and Ti/MoN nanostructures for barrier applications in Cu interconnects," Nanotechnology, vol. 19, pp. 205202-205207, 2008.
8. T. B. Massalski, Binary Alloy Phase Diagrams. : ASM International, 1990.
9. A. Fleischmann, C. Enns, and G. M. Seidel, Cryogenic Particle Detection, C. Enns, Ed. Berlin: Springer, 2005, 3-540-20113-0.
10. J. A. Chervenak, D. J. Talley, R. P. Brekosky, F. M. Finkbeiner, T. S. Stevenson, S. R. Bandler, E. Figueroa-Feliciano, M. A. Lindeman, R. L. Kelley, T. Saab, and C. K. Stahle, "Fabrication of transition-edge sensor x-ray microcalorimeters for constellation-X," Nuclear Instruments and Methods A, vol. 520, pp. 460-462, 2004, Proc. 10th Workshop on Low Temperature Detectors 2003.
11. J. Chervenak, F. Finkbeiner, S. Bandler, R. Brekosky, A.-D. Brown, E. Figeuroa-Feliciano, N. Iyomoto, R. Kelley, C. Kilbourne, S. Porter, T. Saab, J. Sadleir, and S. Smith, "Materials development for auxiliary components for large compact Mo/Au TES arrays," Journal of Low Temperature Physics, vol. 151, no. 1-2, pp. 255-260, 2008.