Inclined nanoimprinting lithography-based 3D nanofabrication

Journal of Micromechanics and Microengineering

Volumn 21, Issue 6, 2011, Pages

  Liu, Zhan ^a   Bucknall, David G ^a   Allen, Mark G ^b  

^a Georgia Institute of Technology   (United States)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D NANOFABRICATION; ANISOTROPIC SURFACES; BIOMIMICKING; CONTACT MOLDING; FABRICATION COST; INCLINED NANOIMPRINT LITHOGRAPHY; NANO-IMPRINTING; NANOLINES; NANOTRANSFER PRINTING (NTP); PLASMONIC CRYSTALS; PLASMONICS; POLYMER NANOSTRUCTURES; POTENTIAL APPLICATIONS; SILICON-BASED; TOPDOWN;

GOLD; LITHOGRAPHY; METAL MOLDING; NANOSTRUCTURES; PHOTONIC CRYSTALS; PLASMONS; REACTIVE ION ETCHING; REACTIVE MOLDING; SILICONES;

THREE DIMENSIONAL;

EID: 79957937909     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/21/6/065036     Document Type: Article

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