Effect of growth temperature on the catalyst-free growth of long silicon nanowires using radio frequency magnetron sputtering

International Journal of Nanoscience

Volumn 10, Issue 1-2, 2011, Pages 13-17

  Dhara, Soumen ^a   Giri, P K ^a  

^a INDIAN INSTITUTE OF TECHNOLOGY GUWAHATI   (India)

Author keywords

catalyst free growth; Silicon nanowires; sputtering

Indexed keywords

AU CATALYSTS; CATALYST-FREE GROWTH; DEPOSITION TECHNIQUE; FABRICATION ROUTES; GROWTH MECHANISMS; HIGH ASPECT RATIO; METAL CATALYST; RADIO FREQUENCY MAGNETRON SPUTTERING; SI (100) SUBSTRATE; SI NANOWIRE; SI SEED; SILICON NANOWIRES; SPUTTERING TECHNIQUES; STRUCTURE AND MORPHOLOGY; THERMALLY OXIDIZED;

ASPECT RATIO; CATALYSTS; GROWTH TEMPERATURE; MORPHOLOGY; NANORODS; NANOWIRES; RADIO; RADIO WAVES; SUBSTRATES;

SILICON;

EID: 79957870660     PISSN: 0219581X     EISSN: None     Source Type: Journal    
DOI: 10.1142/S0219581X11007594     Document Type: Conference Paper

References (12)

1. J. Xiang, W. Lu, Y. Hu, Y. Wu, H. Yan and C. M. Lieber, Nature 441, 489 (2006).
2. Y. Ahn, J. Dunning and J. Park, Nano Lett. 5, 1367 (2005).
3. B. Tian, X. Zheng, T. J. Kempa, Y. Fang, N. Yu, G. Yu, J. Huang and C. M. Lieber, Nature 449, 885 (2007).
4. N. Wang, B. D. Yao, Y. F. Chan and X. Y. Zhang, Nano Lett. 3, 475 (2003).
5. B. S. Kim, T. W. Koo, J. H. Lee, D. S. Kim, Y. C. Jung, S. W. Hwang, B. L. Choi, E. K. Lee, J. M. Kim and D. Whang, Nano Lett. 9, 864 (2009).
6. N. Wang, Y. H. Tang, Y. F. Zhang, C. S. Lee and S. T. Lee, Phys. Rev. B 58, R16024 (1998).
7. Z. W. Pan, Z. R. Dai, L. Xu, S. T. Lee and Z. L. Wang, J. Phys. Chem. B 105, 2507 (2001).
8. B. Marsen and K. Sattler, Phys. Rev. B 60, 11593 (1999).
9. X. W. Zhao and F. Y. Yang, J. Vac. Sci. Technol. B 26, 675 (2008).
10. L. Z. Pei, Y. H. Tang, Y. W. Chen, C. Guo, W. Zhang and Y. Zhang, J. Cryst. Growth 289, 423 (2006).
11. S. N. Mohammad, J. Chem. Phys. 127, 244702 (2007).
12. J. Niu, J. Sha and D. Yang, Physica E 23, 131 (2004).