Free-standing patterned ceramic structures obtained by soft micromolding

Advanced Engineering Materials

Volumn 13, Issue 6, 2011, Pages 502-508

  Seils, Sascha ^a   Baraki, Raschid ^a   Jamin, Christine ^a   Guillon, Olivier ^a  

^a DARMSTADT UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC FILM; CERAMIC STRUCTURE; CONSTANT THICKNESS; DIMENSIONAL CHANGES; ELECTRONIC COMPONENT; FLOWTHROUGH; HIGH ASPECT RATIO; INERT ATMOSPHERES; LATERAL RESOLUTION; LITHOGRAPHIC METHODS; MEMS APPLICATIONS; MICROMOLDING; MICROMOLDING IN CAPILLARIES; SAPPHIRE SUBSTRATES;

AMORPHOUS CARBON; ASPECT RATIO; MICROMACHINING; MOLDING; SINTERING;

CERAMIC MATERIALS;

EID: 79957711091     PISSN: 14381656     EISSN: 15272648     Source Type: Journal    
DOI: 10.1002/adem.201100013     Document Type: Article

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