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Volumn 415, Issue 1 SUPPL, 2011, Pages

Erosion of a-C:D thin films by low energy D+, D2 +, and D3 + ion beam irradiation

Author keywords

[No Author keywords available]

Indexed keywords

DEUTERIUM; ELLIPSOMETRY; ION BEAMS; ION BOMBARDMENT; IONS; MASS SPECTROMETRY; SPUTTERING;

EID: 79957670930     PISSN: 00223115     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jnucmat.2010.08.037     Document Type: Conference Paper
Times cited : (3)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.