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Volumn 415, Issue 1 SUPPL, 2011, Pages
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Erosion of a-C:D thin films by low energy D+, D2 +, and D3 + ion beam irradiation
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Author keywords
[No Author keywords available]
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Indexed keywords
DEUTERIUM;
ELLIPSOMETRY;
ION BEAMS;
ION BOMBARDMENT;
IONS;
MASS SPECTROMETRY;
SPUTTERING;
ION BEAM IRRADIATION;
LOW-ENERGY IMPACT;
MASS SPECTROSCOPY;
MASS-LOSS MEASUREMENT;
MEASUREMENTS OF;
MOLECULAR SIZE EFFECT;
PRODUCTION YIELD;
SPUTTERING YIELDS;
THIN FILMS;
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EID: 79957670930
PISSN: 00223115
EISSN: None
Source Type: Journal
DOI: 10.1016/j.jnucmat.2010.08.037 Document Type: Conference Paper |
Times cited : (3)
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References (16)
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