Evidence of noble metal diffusion in polymers at room temperature and its retardation by a chromium barrier

Applied Physics Letters

Volumn 81, Issue 2, 2002, Pages 244-246

  Thran, A ^a   Strunskus, T ^a   Zaporojtchenko, V ^a   Faupel, F ^a  

^a UNIVERSITY OF KIEL   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AG DIFFUSION; CHROMIUM FILM; DIFFUSION DIRECTION; EFFECTIVE DIFFUSION; KRYPTON IONS; METAL DIFFUSION; ORGANIC LOW-K; ROOM TEMPERATURE; SELF AGGREGATION; SERIAL SECTIONING; TRACE AMOUNTS;

CHROMIUM; DIFFUSION IN SOLIDS; MICROELECTRONICS; MONOLAYERS; ORGANIC POLYMERS; PRECIOUS METALS;

DIFFUSION BARRIERS;

EID: 79956052853     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1491609     Document Type: Article

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