Atomistic-to-continuum description of vacancy cluster properties in crystalline silicon

Applied Physics Letters

Volumn 80, Issue 11, 2002, Pages 1951-1953

  Prasad, Manish ^a   Sinno, Talid ^a  

^a UNIVERSITY OF PENNSYLVANIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CLUSTER FORMATIONS; CRYSTALLINE SILICONS; EXPERIMENTAL MEASUREMENTS; INTERATOMIC POTENTIAL; PROCESS SIMULATORS; SI (1 1 1); SIZE SCALING; SYNERGISTIC COMBINATIONS; THERMAL-ANNEALING; VACANCY CLUSTER; VOID FORMATION;

CRYSTAL GROWTH; FREE ENERGY; MOLECULAR DYNAMICS; RADIATION DAMAGE;

SILICON WAFERS;

EID: 79955994679     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1461050     Document Type: Article

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