Microscale thermal fluid transport process in a microchannel integrated with arrays of temperature and pressure sensors

Microfluidics and Nanofluidics

Volumn 10, Issue 4, 2011, Pages 793-807

  Ko, H S ^a   Gau, C ^a  

^a NATIONAL CHENG KUNG UNIVERSITY   (Taiwan)

Author keywords

MicroChannel; Microscale heat transfer; Pressure sensor arrays; Temperature sensor arrays

Indexed keywords

BOTTOM WALL; CHANNEL WALL; COMPLICATED FLOW; EXPERIMENTAL TEST; FABRICATION PROCESS; HEATED WALL; LOCAL HEAT TRANSFER; LOCAL PRESSURE DROP; LOW REYNOLDS NUMBER; LOW THERMAL CONDUCTIVITY; MICRO FLUIDIC SYSTEM; MICRO-SCALES; MICROSCALE HEAT TRANSFER; POLYMER MATERIALS; PRESSURE AND TEMPERATURE SENSORS; SIMPLIFIED MODELS; SIMULTANEOUS MEASUREMENT; THEORETICAL PREDICTION; THERMAL FLUIDS; TRANSPORT PROCESS; YOUNG'S MODULUS;

HEAT TRANSFER; INCOMPRESSIBLE FLOW; PRESSURE DROP; PRESSURE SENSORS; REYNOLDS NUMBER; SENSOR ARRAYS; TEMPERATURE SENSORS; THERMAL CONDUCTIVITY; TRANSPORT PROPERTIES;

MICROCHANNELS;

EID: 79955972949     PISSN: 16134982     EISSN: 16134990     Source Type: Journal    
DOI: 10.1007/s10404-010-0710-4     Document Type: Article

References (31)

1. Bayraktar T, Pidugu SB (2006) Review: characterization of liquid flows in microfluidic systems. Int J Heat Mass Transf 49:815-824 (Pubitemid 43267695)
2. Boresi AP, Schmidt RJ, Sidebottom OM (1993) Advanced mechanics of materials. Wiley, New York, pp 538-539
3. Choi SB, Barron RF, Warrington RO (1991) Fluid flow and heat transfer in microtubes. ASME DSC 32:123-134
4. Craighead H (2006) Future lab-on-chip technologies for interrogating individual molecules. Nature 442(27):387-393 (Pubitemid 44264782)
5. Dellmann L, Roth S, Beuret C, Racine GA, Lorenz H, Despont M, Renaud P, Vettiger P (1997) Fabrication process of high aspect ratio elastic structures for piezoelectric motor applications. In: Proceedings of the Transducers '97, Chicago, USA
6. Dongari N, Sharma A, Durst F (2009) Pressure-driven diffusive gas flows in micro-channels: from the Knudsen to the continuum regimes. Microfluid Nanofluid 6:679-692
7. Guckel H (1990) Surface micromachined pressure transducer. Sens Actuators A 28:133-146
8. Guckel H, Christenson TR, Skrobis KJ, Sniegowski JJ, Kang JW, Choi B, Lovell EG (1990) Microstructure sensors. In: IEEE international electron devices meeting, pp 613-616
9. Incropera FP, DeWitt DP, Bergman TL, Lavine AS (2007) Fundamentals of heat and mass transfer, chap 8, 6th edn. Wiley, New York
10. Jiang L, Wong M, Yitshak Z (1999) Phase change in microchannel heat sinks with integrated temperature sensors. J Microelectromech Syst 8:358-365 (Pubitemid 30552562)
11. Kays WM, Crawford ME, Weigand B (2005) Convective heat and mass transfer, chap 8, 4th edn. McGraw-Hill, New York
12. Ko HS (2009) Fabrication and development of micro fluidic system with embedded micro pressure and temperature sensors for study of thermal and fluid flow properties. PhD thesis, National Cheng Kung University, Tainan, Taiwan
13. Ko HS, Liu CW, Gau C (2007a) A novel fabrication for pressure sensor with polymer material and evaluation of its performance. J Micromech Microeng 17:1640-1648 (Pubitemid 47214527)
14. Ko HS, Liu CW, Gau C, Yang CS (2007b) Fabrication and design of a heat transfer micro-channel system by a low temperature MEMS technique. J Micromech Microeng 17:983-993 (Pubitemid 46656152)
15. Ko HS, Liu CW, Gau C, Jeng DZ (2008) Flow characteristics in a microchannel system integrated with arrays of micro pressure sensors using polymer material. J Micromech Microeng 18:075016
16. Koo J, Kleinstreuer C (2003) Liquid flow in microchannels: experimental observations and computational analyses of microfluidics effects. J Micromech Microeng 13:568-579
17. Lee WY, Wong M, Zohar Y (2002) Pressure loss in constriction microchannels. J Microelectromech Syst 11(3):236-244 (Pubitemid 34784508)
18. Li D (2004) Electrokinetics in microfluidics, vol 2. Elsevier, Boston
19. Lorenz H, Despont M, Fahrni N, LaBianca N, Renaud P, Vettiger P (1997) A low-cost negative resist for MEMS. J Micromech Microeng 7:121-124
20. Morini GL (2004) Single-phase convective heat transfer in microchannels: a review of experimental results. Int J Therm Sci 43:631-651
21. Naito E (1984) Laminar heat transfer in the entrance region between parallel plates - the case of uniform heat flux. Heat Transf Jpn Res 13(3):92-106
22. Natrajan VK, Christensen KT (2010) The impact of surface roughness on flow through a rectangular microchannel from the laminar to turbulent regimes. Microfluid Nanofluid 9:95-121
23. Peng XF, Peterson GP (1996) Convective heat transfer and flow friction for water flow in microchannel structures. Int J Heat Mass Transf 39:2599-2608 (Pubitemid 126378594)
24. Peng XF, Peterson GP, Wang BX (1994) Frictional flow characteristics of water flowing through rectangular microchannels. Exp Heat Transf 7:249-264
25. Prasher RS, Chang J-Y, Sauciuc I, Narasimhan S, Chau D, Chrysler G, Myers A, Prstic S, Hu C (2005) Nano and micro technology-based next generation package-level cooling solution. Intel Technol J 9(4):285-296
26. Rohsenow WM, Hartnett JP, Ganic EN (1985) Handbook of heat transfer fundamentals, 2nd edn. McGraw-Hill, New York, pp 7-49
27. Rostami AA, Mujumdar AS, Saniei N (2002) Flow and heat transfer for gas flowing in microchannel: a review. Heat Mass Transf 38:359-367 (Pubitemid 34882384)
28. Tuckerman DB, Pease RFW (1981) High-performance heat sinking for VLSI. IEEE Electron Device Lett 2:126-129
29. Wu HY, Cheng P (2003) Friction factors in smooth trapezoidal silicon microchannels with different aspect ratios. Int J Heat Mass Transf 46:2519-2525 (Pubitemid 36610806)
30. Yu D, Warrington RO, Barron R, Ameel T (1995) An experimental and theoretical investigation of fluid flow and heat transfer in microtubes. In: Proceedings of ASME/JSME thermal engineering joint conference, Maui, pp 523-530
31. Zohar Y, Lee YK, Lee WY, Jiang L, Tong P (2002) Subsonic gas flow in a straight and uniform microchannel. J Fluid Mech 472:125-151 (Pubitemid 36022113)