High density patterned media fabrication using Jet and Flash Imprint Lithography

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7970, Issue , 2011, Pages

  Ye, Zhengmao ^a   Ramos, Rick ^a   Brooks, Cynthia ^a   Simpson, Logan ^a   Fretwell, John ^a   Carden, Scott ^a   Hellebrekers, Paul ^a   LaBrake, Dwayne ^a   Resnick, Douglas J ^a   Sreenivasan, S V ^a  

^a MOLECULAR IMPRINTS INC   (United States)

Author keywords

Adhesion promoter; Bit pattern media; Discrete track recording; Imprint lithography; J FIL; Jet and Flash Imprint Lithography; Template

Indexed keywords

ADHESION PROMOTER; BIT PATTERN MEDIA; DISCRETE TRACK RECORDING; IMPRINT LITHOGRAPHY; J-FIL; TEMPLATE;

ADHESION; MANUFACTURE; SUBSTRATES;

NANOIMPRINT LITHOGRAPHY;

EID: 79955879671     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.879932     Document Type: Conference Paper

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