Performance and limitation of nanomeasuring technology

International Journal of Nanomanufacturing

Volumn 7, Issue 1, 2011, Pages 54-62

  Jaeger, Gerd ^a   Manske, Eberhard ^a   Hausotte, Tino ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

Abbe comparator principle; Metrological analysis; Working modes

Indexed keywords

COMPARATOR CIRCUITS; COMPARATORS (OPTICAL); HELIUM; HELIUM NEON LASERS; MACHINE DESIGN; REFRACTIVE INDEX; SCANNING;

ABBE COMPARATOR PRINCIPLE; METROLOGICAL ANALYSIS; NANO-POSITIONING; NANOMETROLOGY; SCANNING MODE; SCANNING PROBES; SECOND ORDERS; WORKING MODE;

PRECISION ENGINEERING;

EID: 79955856782     PISSN: 17469392     EISSN: 17469406     Source Type: Journal    
DOI: 10.1504/IJNM.2011.039962     Document Type: Article

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