Plane mirror interferometer for precision length measurements

EUSPEN 2005 - Proceedings of the 5th International Conference of the European Society for Precision Engineering and Nanotechnology

Volumn , Issue , 2005, Pages 45-48

  Büchner, Hans Joachim ^a   Jäger, Gerd ^a  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

DIAPHRAGMS; INTERFEROMETERS; PRECISION ENGINEERING;

LENGTH MEASUREMENT; MEASURING ERRORS; PLANE MIRRORS; QUADRATURE SIGNAL;

MIRRORS;

EID: 84919903255     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. Norman Bobroff: Recent advances in displacement measuring interferometry, Meas. Sci. Technol. 4 (1993), 907-926
2. Steinmetz C R 1990 Sub-micron measurement and control on precision machine tools with laser interferometry, Precision Eng. 12, 12-24
3. Hans Büchner: Improvements in or relating to interferometers, UK Patent GB 2 107 079
4. Hans Büchner; Gerd Jäger; Uwe Gerhardt; Klaus Hasche: Entwicklung eines 3Dlaserinterferometrischen Nanomesssystems für den Abbe-fehlerfreien Einbau in Rasterkraftmikroskope, tm-Technisches Messen 66 (1999) 12, 504-510
5. Gerd Jäger; Eberhard Manske; Tino Hausotte; Hans Büchner; Rainer Grünwald; Walter Schott: Nanomeasuring technology-nanomeasuring machines, Proceedings of the 16th Annual Meeting of the ASPE, Crystal City, Arlington, Virginia, USA, Nov. 2001, 23-27
6. Gaoliang Dai; Frank Pohlenz; Hans-Ulrich Danzebrink; Klaus Hasche; Guenter Wilkening: Improving the performance of interferometers in metrological scanning probe microscopes, Meas. Sci. Technol. 15 (2004) 444-450