Electrical microfluidic pressure gauge for elastomer microelectromechanical systems

Journal of Applied Physics

Volumn 102, Issue 8, 2007, Pages

  Kartalov, Emil P ^a,b   Maltezos, George ^b   French Anderson, W ^a   Taylor, Clive R ^a   Scherer, Axel ^b  

^a UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

^b California Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELASTOMERS; ELECTROMECHANICAL DEVICES; MEMS; MICROFLUIDICS;

APPLIED PRESSURE; ELASTOMER MATERIALS; ELECTRICAL MEASUREMENT; ELECTRICAL RESISTANCES; FLUID-FILLED; INSULATING ELASTOMERS; MICRO VALVES; ORDERS OF MAGNITUDE; PRESSURE GAUGES; VALVE ARRAYS;

SILICONES;

EID: 79955411560     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2801008     Document Type: Article

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